Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling
نویسندگان
چکیده
منابع مشابه
Piezoresistive cantilever force-clamp system.
We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or "clamps" the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indenta...
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Piezoresistors are commonly used in microsystems for transducing force, displacement, pressure and acceleration. Silicon piezoresistors can be fabricated using ion implantation, diffusion or epitaxy and are widely used for their low cost and electronic readout. However, the design of piezoresistive cantilevers is complicated by coupling between design parameters as well as fabrication and appli...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2006
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/16/6/s16